Fluorine resin diaphragm valve for 200°C

Fluorine resin diaphragm valve for fluid temperature of 200°C

The valve can be used under a severe environment such as semiconductor and LED manufacturing and on-site where a high level of cleanliness is required.

Features

• Good for fluid temperature of 200°C
• A structure resistant to high temperature heat cycle

Automatic valve

• The air supply port direction can be adjusted 360 degrees.
  　⇒Easy lay out of piping
• The indicator (open/close indication) is equipped as standard.
  　⇒Easy to confirm the valve position

Manual valve

• With LOTO function as standard(Lock-out Tag-out in consideration of safety aspects
  　⇒Prevents miss operation by human error
• Adopt the step toggle operating system by which the opening can be set at 3 stages!
  　⇒Seek ease of use by addition of the function “fully open, intermediate opening (2 steps) and closed”

Application example

• Supply and recovery of electrolyzed sulfuric acid in a resist separation process
• Supply and recovery of high temperature phosphoric acid in a nitride film etching process
• Cleaning and etching devices