Vacuum valves

Vacuum valves

Our vacuum valves are designed for long-term durability.

L-type vacuum bellows valves

  • IVB/IVBL
    The L-type vacuum valve, having a simple structure, enables ease of maintenance. Available sizes are 15A to 100A.
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  • IVBH
    Incorporates a heater outside the body and inside the bellows so that better temperature uniformity is realized
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  • IVB/IVBL/IVBH
    Space-saving valve as the slow exhaust line is structurally integrated with the main valve.
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  • IVBH-C015
    Digital PID temperature controller designed for the L-type vacuum bellows heated valve (IVBH) use.
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  • Magnetic proximity switch for open/close signals
    Detects open/closed status of the valve.
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Ball valves

  • BRW/BRWH
    90° turn open/close ball valve, having a compact and simple structure. A detachable mantle heater is also available.
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Vacuum butterfly valves

  • IVWF
    Enabling flow control at an arbitrary degree of opening, can also be used in a fully open or fully closed condition.
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  • PCA
    Highly durable 3 function APC butterfly valve enables isolation sealing, slow exhaust and pressure control, all through the adoption of a sealing method by our unique mechanism.
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Square vacuum gate valves

  • UXG/LG
    Non-sliding gate valve reduces particle generation when the valve is opening/closing. The valve slit plate and body can be heated.
    Digital Catalog
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