Ultra high purity gas valves

Ultra high purity gas valves

Our gas valves offer the highest level of reliability and durability.

Diaphragm valves; low pressure

  • KD
    ManualPneumatic
    Compactly designed valve
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  • Two step valve
    Pneumatic
    Allows for 2 separate pneumatic control of 1. Full open to full closed, and 2. Pre-set metered flow.
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  • High-temperature valve (250°C)
    Pneumatic
    With an all-metal actuator, can be used in a high-temperature environment.
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  • LOTO valve
    Manual
    90°turn open/close Lock Out- Tag-Out valve.
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  • Quick turn valve
    Manual
    With a spring load designed into the actuator/handle, the actuation, it is only fully open, or fully closed, never in an intermediate state.
    Digital Catalog
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  • KCD
    ManualPneumatic
    Compactly designed valve based on KD series.
    Digital Catalog
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  • VLD
    ManualPneumatic
    This valve based on the KD series, carries forward the level of performance, functionality and durability, and realizes low cost.
    Digital Catalog
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  • VLCD
    Pneumatic
    Compactly designed valve based on VLD series.
    Digital Catalog
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  • ZCD
    ManualPneumatic
    Offers excellent gas displacement characteristics.
    Digital Catalog
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  • Multi-valve mono block type
    ManualPneumatic
    Including two valves blocked into one, excels in degassing characteristics.
    Digital Catalog
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  • Multi-vale mono block flicker type
    ManualPneumatic
    Compact body excess in degassing/purge ability via low internal volume.
    Digital Catalog
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  • TD B-seal IGS valve
    ManualPneumatic
    Designed for gas supply system use with our unique sealing method “B-seal”.
    Digital Catalog
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  • TD C-seal IGS valve
    Pneumatic
    IGS Surface Mount valve, designed to reduce gas stick footprint and ease of maintenance.
    Digital Catalog
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Diaphragm valves; high pressure

  • RD
    ManualPneumatic
    High-pressure valve with a compact design.
    Digital Catalog
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  • VRD
    Manual
    Designed based on RD series, carries forward the level of performance, function and durability, and realizes low cost.
    Digital Catalog
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Diaphragm valve for liquid gas

  • WD
    ManualPneumatic
    Designed for liquid and gas. Valve seat replaceable.
    Digital Catalog
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Bellows valves

  • IB
    ManualPneumatic
    The Bellows valve is designed for standard and high temperatures, and has increased CV compared to the diaphragm valve.
    Digital Catalog
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  • Variable flow valve
    Pneumatic
    Offers a range of metered flow settings, as well as full flow to shut off.
    Digital Catalog
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  • SBB straight-type
    ManualPneumatic
    Pipe-size bellows valve enabling a high Cv value and high durability.
    Digital Catalog
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  • IBC/IBD/IBE large-diameter straight-type
    ManualPneumatic
    Compact Y-shaped large flow valve equipped with a high Cv value and durability.
    Digital Catalog
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Needle valve

  • Flow-control needle valve
    Manual
    High temperature and excellent corrosion resistant, as well as metering capability.
    Digital Catalog
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Check valve

  • IC
    Pneumatic
    Poppet sliding type can be used for low pressure to high pressure.
    Digital Catalog
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Clean butterfly valve

  • BZD
    Manual
    Meet with high purity requirement in semiconductor application with our unique technology to a butterfly valve for general industry use.
    Digital Catalog
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